Semiconductor Processing

Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled. The author begins with an overview of plasma reactors and discusses the various models for understanding plasma processes. He then covers plasma chemistry, addressing the effects of different chemicals on the features being etched. Having presented the relevant background material, he then describes in detail the modeling of complex plasma systems, with reference to experimental results. The book closes with a useful glossary of technical terms. No prior knowledge of plasma physics is assumed in the book. It contains many homework exercises and serves as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science. It will also be a useful reference for practicing engineers in the semiconductor industry.

From physical process to practical applications — Singh makes the complexities of modern semiconductor devices clear! The semiconductor devices that are driving today’ s information, technologies may seem remarkably complex, but they don’ t have to be impossible to understand. Filled with figures, flowcharts, and solved examples, Jasprit Singh’ s Semiconductor Devices provides an accessible, well-balanced introduction to semiconductor physics and its application to modern devices. Beginning with the physical process behind semiconductor devices, Singh clearly explains difficult topics, including bandstructure, effective masses, holes, doping, carrier transport, and lifetimes. Following these physical fundamentals, you’ ll explore the operation of important semiconductor devices, such as diodes, transistors, light emitters, and detectors, along with issues relating to the optimization of device performance. FeaturesOver 150 solved examples, integrated throughout the text, clarify difficult concepts.End-of-chapter summary tables and hundreds of figures reinforce the intricacies of modern semiconductor devices.Discussion of device optimization issues explains why you have to trade one performance against another in devices.Shows the relationship of physical parameters to SPICE parameters and its impact on circuit issues.Technology Roadmaps outline what’ s currently happening in the field and present a look at where device technology is headed in the future.A Bit of History sections, included in each chapter, explore the history of the concepts developed and provide a snapshot of the personalities involved and the challenges of the time.